System Configuration:

• 4 & 5 Inch Systems Available
• 3 Sputter Stations (Conmag I Sources)
• 1 Etching Station
• MKS 250B Controllers
• FLUKE 1722A Controllers
• Wafer Process Controller
• Wafer Loader Controller
• Vacuum System Controller
• Stop Alarm Controller
• Thermo Gauge Controller
• 845 Ionization Gauge Controller
• RF Matching Controller
• Cassette Motor Controller
• Wide Range Thin Film Monitor
• CTi Control Panel
• 12KW Power Supplies
• RF Power Supply
• CTi-Onboard Cryo Pump with Compressor
• Ferrofluidic Coaxial Feedthru
• Optional CTi-Water Pump (Available upon request)

  *Please call for more information.