System Configuration:

• Conmag II Sources
• Quantum Sources (available)
• DC Biasable SST Heaters (available)
• Digital Eurotherm Heater Controllers (available)
• Recipe Controlled Heaters
• RF Etch Station with Heat
• RF Ignitor
• Vips (available)
• Load Lock Turbo
• Fluke 1722A Controller or ECS Controller
• 12KW Gen II Power Supplies (Switchable to 3 or 6KW)
• CTi On-Board Cryo Pump with Compressor
• Optional CTi Water Pump ( Available )

*Please call for more information.