System Configuration:

• Quantum Sources
• DC Biasable SST Heaters
• Digital Eurotherm Heater Controllers
• Recipe Controlled Heaters
• RF Etch Station with Heat
• Low Voltage Ignitor
• Vips Option with V250 Turbo Pump
• Load Lock Turbo Option with V70 Turbo Pump
• ECS Control System
• 17 Inch Touchscreen Monitor
• Ferro-Fluidic Coaxial Feedthru
• 12KW Gen II Power Supplies (Switchable to 3 or 6KW)
• CTi On-Board Cryo Pump with Compressor
• Optional CTi Water Pump ( Available upon request )

*Please call for more information.