System Configuration:

• 4 PVD Modules
• 200mm Tool
• Ebara Fast Regen Cryopumps on all PVD Modules
• Horizontal Orientation
• Quantum Targets
• 12kW Power Supplies for 2 PVD Modules
• 24kW Power Supplies for 2 PVD Modules
• t/Degas and Cooling Stations
• Resident Hard D
• DCM has Prehearives in IPC

*Please call for more information.